JPH024236U - - Google Patents
Info
- Publication number
- JPH024236U JPH024236U JP6837189U JP6837189U JPH024236U JP H024236 U JPH024236 U JP H024236U JP 6837189 U JP6837189 U JP 6837189U JP 6837189 U JP6837189 U JP 6837189U JP H024236 U JPH024236 U JP H024236U
- Authority
- JP
- Japan
- Prior art keywords
- utility
- model registration
- holding jig
- cut
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000003779 heat-resistant material Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989068371U JPH0632678Y2 (ja) | 1989-06-12 | 1989-06-12 | ウエーハボート搬送用保持治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989068371U JPH0632678Y2 (ja) | 1989-06-12 | 1989-06-12 | ウエーハボート搬送用保持治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH024236U true JPH024236U (en]) | 1990-01-11 |
| JPH0632678Y2 JPH0632678Y2 (ja) | 1994-08-24 |
Family
ID=31293693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989068371U Expired - Lifetime JPH0632678Y2 (ja) | 1989-06-12 | 1989-06-12 | ウエーハボート搬送用保持治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0632678Y2 (en]) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5699851U (en]) * | 1979-12-27 | 1981-08-06 | ||
| JPS6078137U (ja) * | 1983-11-02 | 1985-05-31 | 信越石英株式会社 | ウエ−ハ搬送装置 |
| JPS60119715A (ja) * | 1983-12-01 | 1985-06-27 | Toshiba Ceramics Co Ltd | 石英ガラス製半導体ウエハ−ボ−ト搬送用具 |
-
1989
- 1989-06-12 JP JP1989068371U patent/JPH0632678Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5699851U (en]) * | 1979-12-27 | 1981-08-06 | ||
| JPS6078137U (ja) * | 1983-11-02 | 1985-05-31 | 信越石英株式会社 | ウエ−ハ搬送装置 |
| JPS60119715A (ja) * | 1983-12-01 | 1985-06-27 | Toshiba Ceramics Co Ltd | 石英ガラス製半導体ウエハ−ボ−ト搬送用具 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0632678Y2 (ja) | 1994-08-24 |